Dr. Yuebin Ning Profile

Dr. Yuebin Ning

VP Research at Norcada Inc

SPIE Involvement:

Author

Publications (4)

Proceedings Article | 9 March 2013 Paper

Fabrication of thin vertical mirrors through plasma etch and KOH:IPA polishing for integration into MEMS electrostatic actuators

M. Huda, T. M. Amin, Y. Ning, G. McKinnon, J. Tulip, W. Jäger

Proceedings Volume 8612, 86120D (2013) https://doi.org/10.1117/12.2005119

KEYWORDS: Etching, Mirrors, Deep reactive ion etching, Actuators, Microelectromechanical systems, Polishing, Silicon, Plasma etching, Semiconducting wafers, Surface finishing

Read Abstract +

Proceedings Article | 17 October 2012 Paper

A virtual pivot point MEMS rotary comb actuator for tunable laser applications

T. M. Amin, M. Huda, Y. Ning, G. McKinnon, J. Tulip, W. Jäger

Proceedings Volume 8490, 84900D (2012) https://doi.org/10.1117/12.930028

KEYWORDS: Actuators, Oxides, Mirrors, Tunable lasers, Microelectromechanical systems, Silicon, Semiconducting wafers, Deep reactive ion etching, Etching, Optical alignment

Read Abstract +

SPIE Journal Paper | 20 June 2012

Rotary microelectromechanical system comb-drive actuator with smooth sidewall for photonic applications

Mohammad Quamrul Huda, Talukder Mohammad Amin, Wolfgang Jaeger, Yuebin Ning, Graham McKinnon, John Tulip

JM3, Vol. 11, Issue 02, 023012, (June 2012) https://doi.org/10.1117/12.10.1117/1.JMM.11.2.023012

KEYWORDS: Actuators, Deep reactive ion etching, Etching, Microelectromechanical systems, Oxides, Silicon, Scanning electron microscopy, Gold, Sputter deposition, Atomic force microscopy

Read Abstract +

Proceedings Article | 7 February 2012 Paper

Rotary MEMS comb-drive actuator with large deflection for photonic applications

M. Q. Huda, T. M. F. Amin, Y. Ning, G. McKinnon, J. Tulip, W. Jäger

Proceedings Volume 8248, 824804 (2012) https://doi.org/10.1117/12.909647

KEYWORDS: Etching, Deep reactive ion etching, Actuators, Oxides, Microelectromechanical systems, Reactive ion etching, Scanning electron microscopy, Polymers, Silicon, Semiconducting wafers

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years