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Dr. Youngjin Cho
at Cornell Univ
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Author
Publications (1)
Proceedings Article | 16 April 2011 Paper
Environmentally friendly natural materials-based photoacid generators for next-generation photolithography
Youngjin Cho, Christine Ouyang, Marie Krysak, Wenjie Sun, Victor Gamez, Reyes Sierra-Alvarez, Christopher Ober
Proceedings Volume 7972, 79722A (2011) https://doi.org/10.1117/12.879816
KEYWORDS: Lithography, Scanning electron microscopy, Electron beam lithography, Photoresist materials, Semiconducting wafers, Nitrogen, Chromatography, Polymers, Optical lithography, Glucose
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