Dr. Yuan Gan
at Dongfang Jingyuan Electron Ltd
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 10 April 2024 Presentation + Paper
Proceedings Volume 12954, 129540K (2024) https://doi.org/10.1117/12.3010034
KEYWORDS: Optical proximity correction, Calibration, Contour modeling, Scanning electron microscopy, Data modeling, Data acquisition, Contour extraction, Image quality, Critical dimension metrology, Process modeling

Proceedings Article | 10 April 2024 Poster + Paper
Proceedings Volume 12955, 129552E (2024) https://doi.org/10.1117/12.3010013
KEYWORDS: Inspection, Design, Defect detection, Defect inspection, Scanning electron microscopy, Manufacturing

Proceedings Article | 28 April 2023 Poster + Paper
Yuan Gan, Changlian Yan, Rongjia Zhang, Ming Ding, Chunying Han, Junhai Jiang, Zongchang Yu
Proceedings Volume 12495, 124951L (2023) https://doi.org/10.1117/12.2656632
KEYWORDS: Scanning electron microscopy, Semiconducting wafers, Inspection, Design and modelling, Tunable filters, Defect detection, Optical lithography, Optical proximity correction, Wafer inspection, Design for manufacturing

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