Mr. Yuhe Shao Profile

Yuhe Shao

Research Assistant at Montana State Univ

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Publications (2)

SPIE Journal Paper | 1 October 2005

MOEMS 3-D scan mirror for single-point control of beam deflection and focus

Yuhe Shao, David Dickensheets

JM3, Vol. 4, Issue 04, 041502, (October 2005) https://doi.org/10.1117/12.10.1117/1.2107127

KEYWORDS: Mirrors, 3D scanning, Silicon, Etching, Microopto electromechanical systems, Microscopes, Confocal microscopy, Electrodes, 3D acquisition, Control systems

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Proceedings Article | 24 January 2004 Paper

MEMS 3D scan mirror

Yuhe Shao, David Dickensheets

Proceedings Volume 5348, (2004) https://doi.org/10.1117/12.523902

KEYWORDS: Mirrors, Etching, Silicon, 3D scanning, Electrodes, 3D acquisition, Microelectromechanical systems, Microscopes, Confocal microscopy, Oxides

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