Akinori Ohkubo
Principal Optical Engineer
SPIE Involvement:
Author
Area of Expertise:
Optical metorology , Optical simulation , Optical lithography
Publications (13)

Proceedings Article | 28 September 2023 Poster + Paper
Proceedings Volume 12664, 126640J (2023) https://doi.org/10.1117/12.2676094
KEYWORDS: Overlay metrology, Light sources and illumination, Reflection, Optical alignment, Coherence imaging, Monochromatic aberrations, Optical design, Matrices, Computer simulations, Nanoimprint lithography

Proceedings Article | 3 October 2022 Poster + Paper
Akinori Ohkubo, Jiyoung Chu, Janghwi Lee, Sunghwi Cho, Wondon Joo, Sangwoo Bae
Proceedings Volume 12221, 122211B (2022) https://doi.org/10.1117/12.2631007
KEYWORDS: Diagnostics, Image sensors, Sensors, Geometrical optics, Digital micromirror devices, Calibration, CCD image sensors, Maskless lithography, Micromirrors, Wavefront aberrations

Proceedings Article | 1 August 2021 Presentation + Paper
Proceedings Volume 11818, 118180F (2021) https://doi.org/10.1117/12.2593641
KEYWORDS: Wavefront aberrations, Wafer dicing, Laser beam propagation, Optical filters, Semiconducting wafers, Silicon, Spatial light modulators, Beam shaping, Laser processing, Pulsed laser operation, Semiconductor lasers, Monochromatic aberrations, Modulation

Proceedings Article | 21 August 2020 Presentation + Paper
Proceedings Volume 11467, 114670Y (2020) https://doi.org/10.1117/12.2570415
KEYWORDS: Nonlinear optics, Silicon, Luminescence, Nanoparticles, Semiconducting wafers, Upconversion, Doping, Visible radiation

Proceedings Article | 20 August 2020 Poster + Paper
Proceedings Volume 11485, 114850N (2020) https://doi.org/10.1117/12.2567116
KEYWORDS: Signal to noise ratio, Polarization, Scattering, Near field, Cameras, Semiconducting wafers, Ellipsometry

Showing 5 of 13 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top