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Zhu Shi
at Institute of Semiconductors CAS
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Publications (1)
Proceedings Article | 23 January 2023 Paper
High throughput fabrication of surface gratings on VCSEL using displacement Talbot lithography
Zhu Shi, Baogang Quan, Fangrong Hu
Proceedings Volume 12556, 125560A (2023) https://doi.org/10.1117/12.2643100
KEYWORDS: Vertical cavity surface emitting lasers, Polarization, Electron beam lithography, Lithography, Image processing, Reactive ion etching, Photoresist materials, Photoresist developing, Etching, Dielectric polarization
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