Laser implantation of plasmonic nanoparticles for photoluminescence enhancement of silicon quantum dots

Lukas Janos Richter; Jürgen Ihlemann

doi:10.1117/12.2650055

17 March 2023 Laser implantation of plasmonic nanoparticles for photoluminescence enhancement of silicon quantum dots

Lukas Janos Richter, Jürgen Ihlemann

Proceedings Volume PC12410, Nanoscale and Quantum Materials: From Synthesis and Laser Processing to Applications 2023; PC124100L (2023) https://doi.org/10.1117/12.2650055
Event: SPIE LASE, 2023, San Francisco, California, United States

Abstract

Laser implantation can be used for the incorporation of metal nanoparticles into a dielectric matrix. To this end, a thin gold coating on a silicon suboxide (SiOx, x < 2) film is irradiated with a nanosecond laser resulting in the formation of gold nanoparticles in this SiOx-film. By thermal treatment, Si quantum dots are formed by a phase separation of SiOx into Si and SiO2. These Si quantum dots exhibit visible-NIR photoluminescence, which is significantly enhanced through the coupling with the nearby plasmonic gold particles. A more than twofold enhancement is obtained.

Conference Presentation

Citation Download Citation

Lukas Janos Richter and Jürgen Ihlemann "Laser implantation of plasmonic nanoparticles for photoluminescence enhancement of silicon quantum dots", Proc. SPIE PC12410, Nanoscale and Quantum Materials: From Synthesis and Laser Processing to Applications 2023, PC124100L (17 March 2023); https://doi.org/10.1117/12.2650055

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