CONFERENCE PROCEEDINGS
Advanced Search
Home > Proceedings > Volume PC12422 > Article
Presentation
16 March 2023 Spatial atomic layer deposition: a new revolution in ultra-fast production of conformal oxide-based optical coatings (Conference Presentation)
John-Olof Rönn, Sauli Virtanen, Paula Päivike, Philipp Maydannik, Kalle Niiranen, Sami Sneck
Author Affiliations +
Proceedings Volume PC12422, Oxide-based Materials and Devices XIV; PC124220T (2023) https://doi.org/10.1117/12.2647299
Event: SPIE OPTO, 2023, San Francisco, California, United States
Abstract
We present a new-generation atomic layer deposition (ALD) technology that revolutionizes the production of conformal optical coatings: the spatial ALD. In spatial ALD, the substrate is rotated across successive process zones to achieve ultra-fast and high-precision thin film deposition. We present our latest results obtained with our novel C2R spatial ALD system, including the fabrication of SiO2, Ta2O5 and Al2O3 with deposition rates reaching > 1 µm/h. We also show that these materials exhibit low surface roughness (<1 Å RMS), low optical loss (<10 ppm @ 1064 nm), excellent uniformity (< 2% over 200 mm) and high damage threshold (up to 40 J/cm2).
Conference Presentation
© (2023) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
John-Olof Rönn, Sauli Virtanen, Paula Päivike, Philipp Maydannik, Kalle Niiranen, and Sami Sneck "Spatial atomic layer deposition: a new revolution in ultra-fast production of conformal oxide-based optical coatings (Conference Presentation)", Proc. SPIE PC12422, Oxide-based Materials and Devices XIV, PC124220T (16 March 2023); https://doi.org/10.1117/12.2647299
ACCESS THE FULL ARTICLE
ORGANIZATIONAL
Sign in with credentials provided by your organization.
INSTITUTIONAL
Select your institution to access the SPIE Digital Library.
SELECT YOUR INSTITUTION
PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
PERSONAL SIGN IN
No SPIE Account? Create one
PURCHASE THIS CONTENT
SUBSCRIBE TO DIGITAL LIBRARY
50 downloads per 1-year subscription
Members: $195
Non-members: $335 ADD TO CART
25 downloads per 1 - year subscription
Members: $145
Non-members: $250 ADD TO CART
PURCHASE SINGLE ARTICLE
Includes PDF, HTML & Video, when available
Members: $17.00
Non-members: $21.00 ADD TO CART
PROCEEDINGS
 PRESENTATION
WATCH
PRESENTATION SAVE TO MY LIBRARY
GET CITATION
Advertisement
Advertisement
KEYWORDS
Atomic layer deposition
Optical coatings
Ultrafast phenomena
Thin films
Thin film deposition
Laser damage threshold
Lenses
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top