Ultra-wideband silicon nitride AWG design

Ashkan Zandi; Mohammad Hossein Enjavi; Christopher Evans; Kyle Dorsey; Sasha Subotic; Michal Cwik; Joel Hensley; Ali Adibi

doi:10.1117/12.2661613

17 March 2023 Ultra-wideband silicon nitride AWG design

Ashkan Zandi, Mohammad Hossein Enjavi, Christopher Evans, Kyle Dorsey, Sasha Subotic, Michal Cwik, Joel Hensley, Ali Adibi

Author Affiliations +

Proceedings Volume PC12431, Photonic and Phononic Properties of Engineered Nanostructures XIII; PC1243107 (2023) https://doi.org/10.1117/12.2661613
Event: SPIE OPTO, 2023, San Francisco, California, United States

Abstract

Arrayed-waveguide-grating (AWG) devices are among the most popular integrated photonic devices for multi-wavelength operations in several applications like optical communications, spectroscopy, and sensing. Here, we introduce a highly miniaturized (overall size < 1 mm2), yet ultra-wideband (wavelength range: 800 nm-1000 nm), silicon nitride AWG design for spectroscopy applications. The fabrication process of the device is CMOS compatible and hence suitable for mass fabrication. The relative uniformity of the response, the small insertion loss of ~1.07 dB, a wavelength resolution of 5 nm, and cross-talk <-25 dB are among the interesting specifications of this design. Combined with a fine narrowband high-resolution stage formed by a microresonator array, this structure can form a wideband high-resolution spectrometer for sensing applications.

Conference Presentation

Citation Download Citation

Ashkan Zandi, Mohammad Hossein Enjavi, Christopher Evans, Kyle Dorsey, Sasha Subotic, Michal Cwik, Joel Hensley, and Ali Adibi "Ultra-wideband silicon nitride AWG design", Proc. SPIE PC12431, Photonic and Phononic Properties of Engineered Nanostructures XIII, PC1243107 (17 March 2023); https://doi.org/10.1117/12.2661613

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