Precise Optical Evaluation Using Phase Measuring Interferometric Techniques

Ronald P. Grosso; Robert Crane Jr.

doi:10.1117/12.957838

25 December 1979 Precise Optical Evaluation Using Phase Measuring Interferometric Techniques

Ronald P. Grosso, Robert Crane Jr.

Proceedings Volume 0192, Interferometry; (1979) https://doi.org/10.1117/12.957838
Event: 23rd Annual Technical Symposium, 1979, San Diego, United States

Abstract

Fabrication of high quality optical surfaces requires both sensitive methods for measuring surface characteristics and delicate control of the fabrication process. Conventional metrology interferometers have been augmented with computer controlled interference phase measuring techniques to give greater accuracy and provide real-time data analysis. Key elements of a Phase Measuring Interferometer (PMI) system are a Twyman-Green interferometer; piezoelectric-driven reference mirror; image detector; and a minicomputer system with a graphic display, keyboard, and hard copier. Surface quality data is obtained by a direct measurement of intensity and computation of phase difference over an aperture containing a 32 x 32 element array. System functions include: isometric contour mapping at variable sensitivity, array subtraction, surface calibration, time averaging, determination of tilt and power over subapertures with respect to a clear aperture, and deconvolution of wavefront data to yield aberration coefficients. The system is being used to produce high-quality reflecting spheres, flats, mirrors, and refractive elements. A measurement uncertainty of <0.01A peak to valley and 0.001 Xrms has been achieved in the evaluation of a large spherical reflector.

Citation Download Citation

Ronald P. Grosso and Robert Crane Jr. "Precise Optical Evaluation Using Phase Measuring Interferometric Techniques", Proc. SPIE 0192, Interferometry, (25 December 1979); https://doi.org/10.1117/12.957838

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