The Zygo Interferometer System

Paul F. Forman

doi:10.1117/12.957835

25 December 1979 The Zygo Interferometer System

Paul F. Forman

Proceedings Volume 0192, Interferometry; (1979) https://doi.org/10.1117/12.957835
Event: 23rd Annual Technical Symposium, 1979, San Diego, United States

Abstract

The Zygo Interferometer System is designed to be suitable for a large spectrum of measurement applications. The fact that it has been widely accepted and is being used in its various configurations establishes the viability of the system architecture upon which it is based. The purpose of this paper is to provide a comprehensive description of this system so as to establish a base-line for what this state-of-the-art and off-the-shelf system can provide.

Citation Download Citation

Paul F. Forman "The Zygo Interferometer System", Proc. SPIE 0192, Interferometry, (25 December 1979); https://doi.org/10.1117/12.957835

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