Paper
18 February 1981 Mercury Cadmium Telluride Hybrid Mosaic Focal Planes
T. Koehler, R. Martineau,, T. Wong, R. Rotolante
Author Affiliations +
Abstract
A unique process for fabricating HgCdTe photodiodes directly on a variety of substrate materials has been developed. This process, which can achieve fill factors in excess of 90%, has the advantages of minimal thermal mismatch, less than 1% crosstalk and scaling to large array sizes. This structure consists of thin, fully delineated HgCdTe detector ele-ments bonded to a substrate which contains CCD's or individual lead-outs for each detector. The junctions are connected with a common grid electrode. D* (4.5μm) of 1.3 x 1010cmHz2/w has been achieved in 4 x 4 element arrays fabricated directly on silicon substrates. These arrays have immediate applications in mosaic sizes up to 4000 detectors and future development potential of 128 x 128 electronically scanned focal planes.
© (1981) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
T. Koehler, R. Martineau,, T. Wong, and R. Rotolante "Mercury Cadmium Telluride Hybrid Mosaic Focal Planes", Proc. SPIE 0244, Mosaic Focal Plane Methodologies I, (18 February 1981); https://doi.org/10.1117/12.959317
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CITATIONS
Cited by 2 scholarly publications.
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KEYWORDS
Mercury cadmium telluride

Sensors

Charge-coupled devices

Ceramics

Quantum efficiency

Silicon

Semiconducting wafers

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