Scanning Microellipsometer For The Spatial Characterization Of Thin Films

D. J. Dunlavy; R. B . Hammond; R. K. Ahrenkiel

doi:10.1117/12.932075

30 December 1981 Scanning Microellipsometer For The Spatial Characterization Of Thin Films

D. J. Dunlavy, R. B . Hammond, R. K. Ahrenkiel

Proceedings Volume 0288, Los Alamos Conf on Optics '81; (1981) https://doi.org/10.1117/12.932075
Event: Los Alamos Conference on Optics, 1981, Los Alamos, United States

Abstract

A polarization-modulated ellipsometer was constructed to investigate the optical properties of surfaces and transparent thin films. In the latter case, the measurement gives a unique determination of the index of refraction n and film thickness t. Using a HeNe laser light source, the beam was focused to a spot size of 50 μm. By stepping the sample across the focal point of the laser beam in both x and y directions, the spatial uniformity could be measured. This apparatus was particularly useful for optical profiling laser-annealed oxide films grown on GaAs. A new technique for laser annealing native oxides on GaAs produced the need for observing spatial structure with spatial resolution of less than 100 μm. Here the laser pulse produced a "crater" in the oxide due to localized healing and subsequent densification of the film (Figs. 1 & 2). This technique allows profiling of film index of refraction and thickness across the laser irradiated area--about 2 to 3 mm in our case. A number of applications in microelectronics are suggested.

Citation Download Citation

D. J. Dunlavy, R. B . Hammond, and R. K. Ahrenkiel "Scanning Microellipsometer For The Spatial Characterization Of Thin Films", Proc. SPIE 0288, Los Alamos Conf on Optics '81, (30 December 1981); https://doi.org/10.1117/12.932075

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available