Creation Of Thin, Highly Doped Layers For Ohmic Contact Formation On N-Type GAAS And SI

Gisela Eckhardt

doi:10.1117/12.933796

15 September 1982 Creation Of Thin, Highly Doped Layers For Ohmic Contact Formation On N-Type GAAS And SI

Gisela Eckhardt

Proceedings Volume 0346, Thin Film Technologies and Special Applications; (1982) https://doi.org/10.1117/12.933796
Event: 1982 Technical Symposium East, 1982, Arlington, United States

Abstract

Ohmic contacts to semiconductors are usually formed between a metal and a highly doped semiconductor layer. A number of techniques are used to produce such layers: alloying of multilayer contact-metal structures containing a dopant, growth of epitaxial layers, shallow diffusion, and shallow ion implantation. All of these methods require the application of elevated temperatures, usually done by furnace annealing. The trends towards very large scale integration (VLSI) and very high speed integrated circuits (VHSIC) have put more stringent requirements on structural and chemical uniformity, on dimensional accuracy, and on specific contact resistance of Ohmic contacts than can be met easily and routinely with standard methods. Substantial improvements of Ohmic-contact properties have been achieved during the past years by employing novel processing techniques such as molecular beam epitaxy, laser or electron-beam annealing.

Citation Download Citation

Gisela Eckhardt "Creation Of Thin, Highly Doped Layers For Ohmic Contact Formation On N-Type GAAS And SI", Proc. SPIE 0346, Thin Film Technologies and Special Applications, (15 September 1982); https://doi.org/10.1117/12.933796

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available