Automatic Inspection Of Fine Lines

David Paterson

doi:10.1117/12.934731

10 August 1983 Automatic Inspection Of Fine Lines

David Paterson

Proceedings Volume 0376, Optical Sensing: Techniques, Benefits, Costs; (1983) https://doi.org/10.1117/12.934731
Event: Optical Sensing Techniques, Benefits, Costs, 1982, Taddington, United Kingdom

Abstract

This paper discusses some of the problems current in the automatic inspection of objects containing repetitive features such as are typically found in a research environment within the electronics industry. The range of features dealt with includes fine lines, complex scenes, and general-purpose edges of the type encountered in everyday high-precision metrology as viewed through a computer-driven coordinate measuring microscope.

Citation Download Citation

David Paterson "Automatic Inspection Of Fine Lines", Proc. SPIE 0376, Optical Sensing: Techniques, Benefits, Costs, (10 August 1983); https://doi.org/10.1117/12.934731

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