Control Of The Optical Properties Of Transparent Conducting Films Prepared By Reactive Magnetron Shuttering

Martin I. Ridge; Ronald P. Howson; Inarid Ten Have

doi:10.1117/12.935531

28 November 1983 Control Of The Optical Properties Of Transparent Conducting Films Prepared By Reactive Magnetron Shuttering

Martin I. Ridge, Ronald P. Howson, Inarid Ten Have

Author Affiliations +

Proceedings Volume 0401, Thin Film Technologies I; (1983) https://doi.org/10.1117/12.935531
Event: 1983 International Technical Conference/Europe, 1983, Geneva, Switzerland

Abstract

Visibly transparent highly conducting indium oxide has been prepared on flexible plastic sheet in a continuous roll-to-roll reactive magnetron sputtering apparatus.Results are presented which show the sensitive dependence of the optical and electrical properties of the coatings on the deposition conditions. Attention is drawn to the control of gas admittance and maanetron current and the necessary procedures are described.

Citation Download Citation

Martin I. Ridge, Ronald P. Howson, and Inarid Ten Have "Control Of The Optical Properties Of Transparent Conducting Films Prepared By Reactive Magnetron Shuttering", Proc. SPIE 0401, Thin Film Technologies I, (28 November 1983); https://doi.org/10.1117/12.935531

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available