Strain Of Metal Surfaces Determined By Optical Ellipsometry

O. Keller; K. Pedersen

doi:10.1117/12.935503

28 November 1983 Strain Of Metal Surfaces Determined By Optical Ellipsometry

O. Keller, K. Pedersen

Proceedings Volume 0401, Thin Film Technologies I; (1983) https://doi.org/10.1117/12.935503
Event: 1983 International Technical Conference/Europe, 1983, Geneva, Switzerland

Abstract

ℓThe state of polarization of light reflected from a strained metal surface is analyzed. It is demonstrated that the reflected light contains contributions which are linear and quadratic functions of strain. As shown, by our measurements on polycrystalline Aℓ, these can be separated by ellipsometry. The reflected light is measured as a function of the orientation of the principal axes of strain and qualitative agreement with theoretical predictions is obtained.

Citation Download Citation

O. Keller and K. Pedersen "Strain Of Metal Surfaces Determined By Optical Ellipsometry", Proc. SPIE 0401, Thin Film Technologies I, (28 November 1983); https://doi.org/10.1117/12.935503

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