The Characterization Of Multilayers Analyzers - Models And Measurements

B. L . Henke; J. Y. Uejio; R. E. Tackaberry; H. T. Yamada

doi:10.1117/12.949669

6 May 1985 The Characterization Of Multilayers Analyzers - Models And Measurements

B. L . Henke, J. Y. Uejio, R. E. Tackaberry, H. T. Yamada

Proceedings Volume 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics; (1985) https://doi.org/10.1117/12.949669
Event: 29th Annual Technical Symposium, 1985, San Diego, United States

Abstract

A procedure is described for the detailed characterization of multilayer analyzers which can be effectively applied to their design, optimization and application for absolute x-ray spectrometry. An accurate analytical model has been developed that is based upon a simple modification of the dynamical Darwin-Prins theory to extend its application to finite multilayer systems. Its equivalence to the optical E&M solution of the Fresnel equations at each interface is demonstrated by detailed calculation comparisons for the reflectivity of a multilayer throughout the angular range of incidence of 0 to 90° . A special spectrograph and experimental method is described for the measurement of the absolute reflectivity characteristics of the multilayer. The experimental measurements at three photon energies in the 100-2000 eV region are fit by the analytical modified Darwin-Prins equation (MDP) for I( 0), generating a detailed characterization of two "state of the art" multilayers, a sputtered tungsten-carbon of 2d 21 70 A and a molecular lead stearate of 2d 100 A. The fitting parameters that are determined in this procedure are applied to help establish the structural characteristics of the particular multilayer.

Citation Download Citation

B. L . Henke, J. Y. Uejio, R. E. Tackaberry, and H. T. Yamada "The Characterization Of Multilayers Analyzers - Models And Measurements", Proc. SPIE 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics, (6 May 1985); https://doi.org/10.1117/12.949669

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