Paper
16 January 1988 Physical Backgrounds Of Laser Inspection Of Surface Roughness
H. A. Ferwerda
Author Affiliations +
Proceedings Volume 0952, Laser Technologies in Industry; (1988) https://doi.org/10.1117/12.968855
Event: Laser Technologies in Industry, 1988, Porto, Portugal
Abstract
We present the physical backgrounds of contactless optical inspection of (rough) surfaces by means of scattering of laser light from these surfaces.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
H. A. Ferwerda "Physical Backgrounds Of Laser Inspection Of Surface Roughness", Proc. SPIE 0952, Laser Technologies in Industry, (16 January 1988); https://doi.org/10.1117/12.968855
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