Characterization Of Titanium Diffusion During Fabrication Of LiNbO[sub]3[/sub] Optical Waveguides Using Analytical Electron Microscopy

Michael A. McCoy; William E. Lee; Norman A. Sanford

doi:10.1117/12.960133

9 February 1989 Characterization Of Titanium Diffusion During Fabrication Of LiNbO₃ Optical Waveguides Using Analytical Electron Microscopy

Michael A. McCoy, William E. Lee, Norman A. Sanford

Author Affiliations +

Proceedings Volume 0994, Optoelectronic Materials, Devices, Packaging, and Interconnects II; (1989) https://doi.org/10.1117/12.960133
Event: O-E/Fiber LASE '88, 1988, Boston, MA, United States

Abstract

Analytical Electron Microscopy (AEM) has been used to characterize the microstructural evolution of thermally evaporated Ti films on single-crystal LiNbO3 substrates. The microstructural evolution exhibits three primary stages: Ti oxidation which is initially observed at 370°C and is essentially complete by ~500°C; formation of a two-phase microstructure of TiO2 and LiNb3O8 at ~800°C which grows epitaxially with respect to the LiNbO3 substrate; eventual diffusion of both phases occurs at 1000°C to leave only a Ti:LiNbO3 solid solution.

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Michael A. McCoy, William E. Lee, and Norman A. Sanford "Characterization Of Titanium Diffusion During Fabrication Of LiNbO₃ Optical Waveguides Using Analytical Electron Microscopy", Proc. SPIE 0994, Optoelectronic Materials, Devices, Packaging, and Interconnects II, (9 February 1989); https://doi.org/10.1117/12.960133

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