Diffraction moire methods and systems: an overview

Vance A. Deason

doi:10.1117/12.170179

1 June 1993 An overview of diffraction moire methods and systems

Vance A. Deason

Proceedings Volume 10268, Optical Inspection and Testing: A Critical Review; 1026806 (1993) https://doi.org/10.1117/12.170179
Event: Applications in Optical Science and Engineering, 1992, Boston, MA, United States

Abstract

Diffraction moire interferometry involves the replication of a diffraction grating onto a specimen and the measurement of subsequent distortions of the grating through optical interferometry. The method is elegant, simple, easily applied and yields high quality data. Many devices have been developed to exploit this method, often for very specialized applications. There have also been several attempts to produce general purpose research instruments some of which have been offered commercially.

This paper will attempt to review the historical development of diffraction moire instrumentation, the current state of the art and future directions. A companion paper in this volume (SPIE CR-46) by JS Epstein will give a more complete review of specific uses of the subject.

Citation Download Citation

Vance A. Deason "An overview of diffraction moire methods and systems", Proc. SPIE 10268, Optical Inspection and Testing: A Critical Review, 1026806 (1 June 1993); https://doi.org/10.1117/12.170179

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