Applications of interferometry and automated inspection in Japan

Toyohiko Yatagai

doi:10.1117/12.170175

1 June 1993 Applications of interferometry and automated inspection in Japan

Toyohiko Yatagai

Proceedings Volume 10268, Optical Inspection and Testing: A Critical Review; 102680F (1993) https://doi.org/10.1117/12.170175
Event: Applications in Optical Science and Engineering, 1992, Boston, MA, United States

Abstract

Recent developments of interferometric techniques for industrial inspection in Japan are reviewed, with special emphasis on automatic fringe analysis, use of unique interferometers, use of advanced devices.

Citation Download Citation

Toyohiko Yatagai "Applications of interferometry and automated inspection in Japan", Proc. SPIE 10268, Optical Inspection and Testing: A Critical Review, 102680F (1 June 1993); https://doi.org/10.1117/12.170175

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