Arrayed lithography using STM-based microcolumns

T. H. Philip Chang; Lawrence P. Muray; Urs Staufer; Mark A. McCord; Dieter P. Kern

doi:10.1117/12.183200

3 October 1993 Arrayed lithography using STM-based microcolumns

T. H. Philip Chang, Lawrence P. Muray, Urs Staufer, Mark A. McCord, Dieter P. Kern

Proceedings Volume 10310, Technology of Proximal Probe Lithography; 1031009 (1993) https://doi.org/10.1117/12.183200
Event: SPIE Institutes for Advanced Optical Technologies 10, 1993, Bellingham, WA, United States

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T. H. Philip Chang, Lawrence P. Muray, Urs Staufer, Mark A. McCord, and Dieter P. Kern "Arrayed lithography using STM-based microcolumns", Proc. SPIE 10310, Technology of Proximal Probe Lithography, 1031009 (3 October 1993); https://doi.org/10.1117/12.183200

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