Metrology applications of scanning probe microscopes

Leigh Ann Files-Sesler; John N. Randall; Francis G. Celii

doi:10.1117/12.183193

3 October 1993 Metrology applications of scanning probe microscopes

Leigh Ann Files-Sesler, John N. Randall, Francis G. Celii

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Proceedings Volume 10310, Technology of Proximal Probe Lithography; 103100J (1993) https://doi.org/10.1117/12.183193
Event: SPIE Institutes for Advanced Optical Technologies 10, 1993, Bellingham, WA, United States

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Leigh Ann Files-Sesler, John N. Randall, and Francis G. Celii "Metrology applications of scanning probe microscopes", Proc. SPIE 10310, Technology of Proximal Probe Lithography, 103100J (3 October 1993); https://doi.org/10.1117/12.183193

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