Comparison between intrinsic and contaminant-induced damages of multilayer dielectric gratings

Yanfei Hao; Mingying Sun; Shuang Shi; Xue Pan; Zhenghao Zhu; Xiangyang Pang; Jianqiang Zhu

doi:10.1117/12.2269753

1 August 2017 Comparison between intrinsic and contaminant-induced damages of multilayer dielectric gratings

Yanfei Hao, Mingying Sun, Shuang Shi, Xue Pan, Zhenghao Zhu, Xiangyang Pang, Jianqiang Zhu

Proceedings Volume 10339, Pacific Rim Laser Damage 2017: Optical Materials for High-Power Lasers; 103390H (2017) https://doi.org/10.1117/12.2269753
Event: Pacific Rim Laser Damage 2017: Optical Materials for High Power Lasers, 2017, Shanghai, China

Abstract

Many literatures have focused on the design, fabrication and intrinsic damage of multilayer dielectric gratings (MLDGs). However, contamination may be a key factor of the MLDGs lifetime. In this paper, we compare the laser damages of the clean and contaminated MLDGs, and damage threshold of clean MLDGs is 3.12J/cm² . We obtain the curve of the critical particle size at various laser fluences, above which the MLDGs will be damaged. Intrinsic LIDT of clean MLDGs is larger than that of contaminated ones, so the cleanness control is a crucial problem for the MLDGs. The scanning electron microscope (SEM) morphologies of intrinsic and contaminant induced damages are different. The intrinsic damage is cold ablation, while contaminant induced damage is thermal ablation.

Citation Download Citation

Yanfei Hao, Mingying Sun, Shuang Shi, Xue Pan, Zhenghao Zhu, Xiangyang Pang, and Jianqiang Zhu "Comparison between intrinsic and contaminant-induced damages of multilayer dielectric gratings", Proc. SPIE 10339, Pacific Rim Laser Damage 2017: Optical Materials for High-Power Lasers, 103390H (1 August 2017); https://doi.org/10.1117/12.2269753

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