The thickness correction of sol-gel coating using ion-beam etching in the preparation of antireflection coating

Siyu Dong; Lingyun Xie; Tao He; Hongfei Jiao; Ganghua Bao; Jinlong Zhang; Zhanshan Wang; Xinbin Cheng

doi:10.1117/12.2271633

6 September 2017 The thickness correction of sol-gel coating using ion-beam etching in the preparation of antireflection coating

Siyu Dong, Lingyun Xie, Tao He, Hongfei Jiao, Ganghua Bao, Jinlong Zhang, Zhanshan Wang, Xinbin Cheng

Author Affiliations +

Proceedings Volume 10356, Nanostructured Thin Films X; 103560S (2017) https://doi.org/10.1117/12.2271633
Event: SPIE Nanoscience + Engineering, 2017, San Diego, California, United States

Abstract

For the sol-gel method, it is still challenging to achieve excellent spectral performance when preparing antireflection (AR) coating by this way. The difficulty lies in controlling the film thickness accurately. To correct the thickness error of sol-gel coating, a hybrid approach that combined conventional sol-gel process with ion-beam etching technology was proposed in this work. The etching rate was carefully adjusted and calibrated to a relatively low value for removing the redundant material. Using atomic force microscope (AFM), it has been demonstrated that film surface morphology will not be changed in this process. After correcting the thickness error, an AR coating working at 1064 nm was prepared with transmittance higher than 99.5%.

Citation Download Citation

Siyu Dong, Lingyun Xie, Tao He, Hongfei Jiao, Ganghua Bao, Jinlong Zhang, Zhanshan Wang, and Xinbin Cheng "The thickness correction of sol-gel coating using ion-beam etching in the preparation of antireflection coating", Proc. SPIE 10356, Nanostructured Thin Films X, 103560S (6 September 2017); https://doi.org/10.1117/12.2271633

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