Intrinsic resolving power of XUV diffraction gratings measured with Fizeau interferometry

Samuel Gleason; Jonathan Manton; Janet Sheung; Taylor Byrum; Cody Jensen; Lingyun Jiang; Joseph Dvorak; Ignace Jarrige; Peter Abbamonte

doi:10.1117/12.2272616

7 September 2017 Intrinsic resolving power of XUV diffraction gratings measured with Fizeau interferometry

Samuel Gleason, Jonathan Manton, Janet Sheung, Taylor Byrum, Cody Jensen, Lingyun Jiang, Joseph Dvorak, Ignace Jarrige, Peter Abbamonte

Author Affiliations +

Proceedings Volume 10385, Advances in Metrology for X-Ray and EUV Optics VII; 1038506 (2017) https://doi.org/10.1117/12.2272616
Event: SPIE Optical Engineering + Applications, 2017, San Diego, California, United States

Abstract

We introduce a method for using Fizeau interferometry to measure the intrinsic resolving power of a diffraction grating. This method is more accurate than traditional techniques based on a long-trace profiler (LTP), since it is sensitive to long-distance phase errors not revealed by a d-spacing map. We demonstrate 50,400 resolving power for a mechanically ruled XUV grating from Inprentus, Inc.

Citation Download Citation

Samuel Gleason, Jonathan Manton, Janet Sheung, Taylor Byrum, Cody Jensen, Lingyun Jiang, Joseph Dvorak, Ignace Jarrige, and Peter Abbamonte "Intrinsic resolving power of XUV diffraction gratings measured with Fizeau interferometry", Proc. SPIE 10385, Advances in Metrology for X-Ray and EUV Optics VII, 1038506 (7 September 2017); https://doi.org/10.1117/12.2272616

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