Recent progress on the scalable fabrication of hybrid polymer/SiO2 nanophotonic cavity arrays with an encapsulated MoS2 film

Sebastian Hammer; Hans-Moritz Mangold; Ariana E. Nguyen; Dominic Martinez-Ta; Sahar Naghibi Alvillar; Ludwig Bartels; Hubert J. Krenner

doi:10.1117/12.2287126

23 February 2018 Recent progress on the scalable fabrication of hybrid polymer/SiO₂ nanophotonic cavity arrays with an encapsulated MoS₂ film

Sebastian Hammer, Hans-Moritz Mangold, Ariana E. Nguyen, Dominic Martinez-Ta, Sahar Naghibi Alvillar, Ludwig Bartels, Hubert J. Krenner

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Proceedings Volume 10534, 2D Photonic Materials and Devices; 105340E (2018) https://doi.org/10.1117/12.2287126
Event: SPIE OPTO, 2018, San Francisco, California, United States

Abstract

We review¹ the fully-scalable fabrication of a large array of hybrid molybdenum disulfide (MoS₂) - silicon dioxide (SiO₂) one-dimensional (1D), freestanding photonic-crystal cavities (PCCs) capable of enhancement of the MoS₂ photoluminescence (PL) at the narrow cavity resonance. As demonstrated in our prior work [S. Hammer et al., Sci. Rep. 7, 7251 (2017)]¹, geometric mode tuning over the wide spectral range of MoS₂ PL can be achieved by changing the PC period. In this contribution, we provide a step-by-step description of the fabrication process and give additional detailed information on the degradation of MoS₂ by XeF₂ vapor. We avoid potential damage of the MoS₂ monolayer during the crucial XeF₂ etch by refraining from stripping the electron beam (e-beam) resist after dry etching of the photonic crystal pattern. The remaining resist on top of the samples encapsulates and protects the MoS₂ film during the entire fabrication process. Albeit the thickness of the remaining resists strongly depends on the fabrication process, the resulting encapsulation of the MoS₂ layer improves the confinement to the optical modes and gives rise to a potential enhancement of the light-matter interaction.

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Sebastian Hammer, Hans-Moritz Mangold, Ariana E. Nguyen, Dominic Martinez-Ta, Sahar Naghibi Alvillar, Ludwig Bartels, and Hubert J. Krenner "Recent progress on the scalable fabrication of hybrid polymer/SiO₂ nanophotonic cavity arrays with an encapsulated MoS₂ film", Proc. SPIE 10534, 2D Photonic Materials and Devices, 105340E (23 February 2018); https://doi.org/10.1117/12.2287126

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KEYWORDS

Molybdenum

Etching

Silicon

Finite-difference time-domain method

Nanophotonics

Chemical vapor deposition

Photonic crystals

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