A novel method to fast fix the post OPC weak-points through Calibre eqDRC application

YaDong Jin; Shizhi Lyu; ZeXi Deng; Cong Lu

doi:10.1117/12.2292695

20 March 2018 A novel method to fast fix the post OPC weak-points through Calibre eqDRC application

YaDong Jin, Shizhi Lyu, ZeXi Deng, Cong Lu

Proceedings Volume 10587, Optical Microlithography XXXI; 1058715 (2018) https://doi.org/10.1117/12.2292695
Event: SPIE Advanced Lithography, 2018, San Jose, California, United States

Abstract

With shrinking nodes, as the layout patterns are becoming more and more complicated, OPC accuracy and performance is becoming increasingly challenging. While we are trying to perfect our OPC script to have a clean output without weak points, in a real urgent tape-out scenario, often there will be weak points and we cannot afford the cost to run the OPC again with an updated OPC recipe. Naturally the post OPC repair becomes the only cost-effective choice. The paper studies and compares a few methods for the post OPC weak-points repair: the manual OPC repair flow and traditional repair flow based on the DRC commands. Here, we introduce a novel method based on the eqDRC commands, which are widely used in the design house but have never been used in the post OPC flow. We discuss how to apply the eqDRC into the post OPC repairs and demonstrate its advantages over the traditional methods.

Citation Download Citation

YaDong Jin, Shizhi Lyu, ZeXi Deng, and Cong Lu "A novel method to fast fix the post OPC weak-points through Calibre eqDRC application", Proc. SPIE 10587, Optical Microlithography XXXI, 1058715 (20 March 2018); https://doi.org/10.1117/12.2292695

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