Paper
29 May 2018 Small uncooled bolometers with a broad spectral response
Francis Généreux, Bruno Tremblay, David Gay, Sebastien Deshaies, Martin Briand, Michel Poirier, Jean-Sol Caron, Jacques-Edmond Paultre, David Béland, Francis Provençal, Daniel Desbiens, Yan Desroches, Christine Alain
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Abstract
This paper reports the infrared spectral responses of 17 and 35 μm uncooled bolometers fabricated at INO. They are measured by making use of an external readout circuit along with a monochromator. As expected, the spectral absorption strongly depends on the bolometer stack as well as the pixel layout. By proper selection of design parameters, the spectral response can be made flat from 3 to 14 μm without significant deterioration of the detector figure of merit.
© (2018) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Francis Généreux, Bruno Tremblay, David Gay, Sebastien Deshaies, Martin Briand, Michel Poirier, Jean-Sol Caron, Jacques-Edmond Paultre, David Béland, Francis Provençal, Daniel Desbiens, Yan Desroches, and Christine Alain "Small uncooled bolometers with a broad spectral response", Proc. SPIE 10624, Infrared Technology and Applications XLIV, 106241D (29 May 2018); https://doi.org/10.1117/12.2307290
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Cited by 2 scholarly publications.
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KEYWORDS
Absorption

Bolometers

Microbolometers

Gold

Monochromators

Polarization

Sensors

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