Broadband Sb/B4C multilayer mirrors for XUV spectroscopy applications

Eugene A. Vishnyakov; Igor A. Kopylets; Valeriy V. Kondratenko; Alexey O. Kolesnikov; Alexey N. Shatokhin; Evgeny N. Ragozin

doi:10.1117/12.2305926

24 May 2018 Broadband Sb/B₄C multilayer mirrors for XUV spectroscopy applications

Eugene A. Vishnyakov, Igor A. Kopylets, Valeriy V. Kondratenko, Alexey O. Kolesnikov, Alexey N. Shatokhin, Evgeny N. Ragozin

Author Affiliations +

Proceedings Volume 10677, Unconventional Optical Imaging; 106772L (2018) https://doi.org/10.1117/12.2305926
Event: SPIE Photonics Europe, 2018, Strasbourg, France

Abstract

We have numerically optimized several broadband aperiodic normal-incidence multilayer mirrors based on Sb/B₄C for the 85 – 125 Å spectral domain for spectroscopy applications below the silicon L-edge (λ = 125 Å). Three multilayer mirrors were then synthesized. The designed multilayer structures were optimized for a maximum uniform reflectivity in the 90 – 100, 95 – 105 and 100 – 120 Å wavebands, respectively. All the Sb/B₄C multilayer mirrors were synthesized via magnetron sputtering in argon medium. The multilayers reflection spectra were evaluated with the use of a laboratory XUV spectrograph employing a laser-plasma radiation source, the mirror under study, a transmission diffraction grating and a backside-illuminated CCD matrix. The experimentally recorded spectra were compared with the theoretical ones. Numerical calculations of aperiodic Sb/B₄C multilayer structures with different layer densities are presented. Effects of lower densities and small random variations of the individual layer widths on the reflection spectra are discussed.

Citation Download Citation

Eugene A. Vishnyakov, Igor A. Kopylets, Valeriy V. Kondratenko, Alexey O. Kolesnikov, Alexey N. Shatokhin, and Evgeny N. Ragozin "Broadband Sb/B₄C multilayer mirrors for XUV spectroscopy applications", Proc. SPIE 10677, Unconventional Optical Imaging, 106772L (24 May 2018); https://doi.org/10.1117/12.2305926

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