Continuous detection of particles on a rotating substrate during thin film deposition

Anna Karoline Rüsseler; Istvan Balasa; Lars Jensen; Detlev Ristau

doi:10.1117/12.2500210

19 November 2018 Continuous detection of particles on a rotating substrate during thin film deposition

Anna Karoline Rüsseler, Istvan Balasa, Lars Jensen, Detlev Ristau

Author Affiliations +

Proceedings Volume 10805, Laser-Induced Damage in Optical Materials 2018: 50th Anniversary Conference; 108051X (2018) https://doi.org/10.1117/12.2500210
Event: SPIE Laser Damage, 2018, Boulder, Colorado, United States

Abstract

Particles, which contaminate the substrate during thin film deposition, are prone to cause irremovable defects and demand special attention in the field of high precision laser optics as they can lead to localized absorption and laser damage. In this contribution, we present a camera based fully in-vacuum device which continuously monitors the coating surface of a transparent test substrate under dark field illumination. We show the possibilities of this setup regarding the sensitivity to small particles (diameter 1 μm). As the first operational test of the particle monitor, singe layers of HfO₂ are grown on fused silica. By analyzing the evolution of the scattering intensity of the particles, we derive their position in the substrate-coating-system. Therefore, this in situ particle detection concept can deliver data on which process step is responsible for particle generation in multilayer films and aims to be a tool to minimize coating defects.

Citation Download Citation

Anna Karoline Rüsseler, Istvan Balasa, Lars Jensen, and Detlev Ristau "Continuous detection of particles on a rotating substrate during thin film deposition", Proc. SPIE 10805, Laser-Induced Damage in Optical Materials 2018: 50th Anniversary Conference, 108051X (19 November 2018); https://doi.org/10.1117/12.2500210

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