Feasibility study of scanning optical focusing detection system

Min Guan; Qitai Huang

doi:10.1117/12.2504768

18 January 2019 Feasibility study of scanning optical focusing detection system

Min Guan, Qitai Huang

Proceedings Volume 10839, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment; 1083902 (2019) https://doi.org/10.1117/12.2504768
Event: Ninth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT2018), 2018, Chengdu, China

Abstract

Simultaneous realization of high-precision and universal detection of freeform surfaces is an important and urgent problem to be solved in optical inspection. To solve this problem, a Twyman-Gre e n interferometric optical probe in conjunction with a standard retroreflective spherical lens design is be proposed in this paper. The detection technology does not need to align the optical probe wit h the normal direction of the measured surface, and only two translational axes and one rotation axis are required for measurement, the location of the measured point is determined by the null interference fringes obtained by the interference of the reference light and the detection light, thereby obtaining the three-dimensional surface shape data of the measured surface. The basic parameters of the optical probe are determined by theoretical calculations and a mathematical model is established. The simulat ion was performed using matlab, and the feasibility of the system structure was verified by building experiments.

Citation Download Citation

Min Guan and Qitai Huang "Feasibility study of scanning optical focusing detection system", Proc. SPIE 10839, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment, 1083902 (18 January 2019); https://doi.org/10.1117/12.2504768

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