Comparison and analysis on the accurate measurement of spherical curvature radius

Yi Shen; Peng Wang; Hao Zhang; Changshun Hui; Kun Yang

doi:10.1117/12.2511470

18 January 2019 Comparison and analysis on the accurate measurement of spherical curvature radius

Yi Shen, Peng Wang, Hao Zhang, Changshun Hui, Kun Yang

Proceedings Volume 10839, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment; 108391V (2019) https://doi.org/10.1117/12.2511470
Event: Ninth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT2018), 2018, Chengdu, China

Abstract

A fundamental issue in spherical optical manufacturing process is how to measure the radius of curvature accurately. Due to the high precision requirement for some advanced optics applications, the accuracy of the measurement is usually crucial. In this paper, kinds of spherical curvature radius methods that use spherometer, laser interferometer and profilometer are introduced, the error sources of these methods are analyzed. A series of measurement experiences with radius rang from R 7.65mm to R790.5mm are carried out and the results are analyzed according to measurement error theory. Consequently the advantages of the three kinds of instruments in radius measurement are obtained.

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Yi Shen, Peng Wang, Hao Zhang, Changshun Hui, and Kun Yang "Comparison and analysis on the accurate measurement of spherical curvature radius", Proc. SPIE 10839, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment, 108391V (18 January 2019); https://doi.org/10.1117/12.2511470

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KEYWORDS

Spherical lenses

Interferometers

Profilometers

Error analysis

Optical spheres

Confocal microscopy

Optics manufacturing

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