Ultrafast lasers for advanced manufacturing of flat panel displays

Terence Hollister; Jim Bovatsek

doi:10.1117/12.2510941

4 March 2019 Ultrafast lasers for advanced manufacturing of flat panel displays

Terence Hollister, Jim Bovatsek

Proceedings Volume 10905, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV; 109050I (2019) https://doi.org/10.1117/12.2510941
Event: SPIE LASE, 2019, San Francisco, California, United States

Abstract

High volume manufacturing of flat panel displays presents many challenges to realize precision features over large panel sizes with high yield and high throughput. Laser technology continues to be a key enabler in many respects. In particular, for cutting display glass plates, ultrafast lasers with pulse durations in the picosecond and femtosecond regime offer unique advantages. Processing display cover glass, which is highly transparent to both visible and UV wavelengths, can benefit from ultrashort laser pulses which deposit a high amount of energy in very short time scales. This allows for fine structuring of the glass with minimal chipping, cracking, and melting. In this work, we present display glass cutting results using state-of-the art, novel picosecond pulse laser technology. High quality and high throughput results are demonstrated, with precise glass cutting achieved with low sidewall roughness at speeds in the 1 m/s regime.

Conference Presentation

Citation Download Citation

Terence Hollister and Jim Bovatsek "Ultrafast lasers for advanced manufacturing of flat panel displays", Proc. SPIE 10905, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV, 109050I (4 March 2019); https://doi.org/10.1117/12.2510941

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