High-resolution wave front phase sensor for silicon wafer metrology

J. M. Trujillo-Sevilla; O. Casanova Gonzalez; S. Bonaque-González; J. Gaudestad; J. M. Rodríguez Ramos

doi:10.1117/12.2505764

4 March 2019 High-resolution wave front phase sensor for silicon wafer metrology

J. M. Trujillo-Sevilla, O. Casanova Gonzalez, S. Bonaque-González, J. Gaudestad, J. M. Rodríguez Ramos

Author Affiliations +

Proceedings Volume 10925, Photonic Instrumentation Engineering VI; 109250I (2019) https://doi.org/10.1117/12.2505764
Event: SPIE OPTO, 2019, San Francisco, California, United States

Abstract

In this work we present a novel wave front phase sensing technique developed by Wooptix. This new wave front phase sensor uses only standard imaging sensor, and does not need any specialized optical hardware to sample the optical field. In addition, the wave front phase recovery is zonal, thus, the obtained wave front phase map provides as much height data points, as pixels in the imaging sensor. We will develop the mathematical foundations of this instrument as well as theoretical and practical limits. Finally, we will expose the application of this sensor to silicon wafer metrology and comparisons against industry standard metrology instruments.

Conference Presentation

Citation Download Citation

J. M. Trujillo-Sevilla, O. Casanova Gonzalez, S. Bonaque-González, J. Gaudestad, and J. M. Rodríguez Ramos "High-resolution wave front phase sensor for silicon wafer metrology", Proc. SPIE 10925, Photonic Instrumentation Engineering VI, 109250I (4 March 2019); https://doi.org/10.1117/12.2505764

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