Refinements in membrane projection lithography: a route to fabrication of 3D metamaterials

Katherine M. Musick; D. Bruce Burckel

doi:10.1117/12.2513632

4 March 2019 Refinements in membrane projection lithography: a route to fabrication of 3D metamaterials

Proceedings Volume 10930, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XII; 1093005 (2019) https://doi.org/10.1117/12.2513632
Event: SPIE OPTO, 2019, San Francisco, California, United States

Abstract

Membrane projection lithography (MPL) is a fabrication approach in which a novel process flow and mature silicon processing equipment combine to create three-dimensional metamaterials with size scales operational at optical frequencies. In its most common realization, MPL leverages microelectromechanical (MEMS) processing techniques to create cubic unit cells with silicon walls, planarized by chemical mechanical polishing (CMP), a technique that is not omnipresent in fabrication facilities. Here we show several variants of MPL, two of which do not require CMP to make the MPL process compatible with low-tech fabrication environments and open the MPL process to a wider audience.

Citation Download Citation

Katherine M. Musick and D. Bruce Burckel "Refinements in membrane projection lithography: a route to fabrication of 3D metamaterials", Proc. SPIE 10930, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XII, 1093005 (4 March 2019); https://doi.org/10.1117/12.2513632

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