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The design and implementation of metasurface-based flat lenses have come to the forefront of ongoing scientific research and technology development. These novel photonic devices use sub-wavelength metal or dielectric resonators spaced on a specific two-dimensional pattern that mimic the phase profile of conventional bulk optical elements. However, most of these structures, or metasurfaces, have so far been passive with its optical performance determined only by the spatial configuration of the metasurface constitutive elements. The development of dynamic metasurfaces is currently a growing area of research directed to obtain real-time tunable operation of metasurfaces and new physical phenomena not feasible with static metasurfaces. Faster reconfigurable metasurfaces can be achieved by incorporating nanostructures with different optical response onto MEMS based actuators. The MEMS-metasurface platform enables electrostatic control of curvature, tilt angle and deformation of metasurfaces, enabling flat and agile optical elements with micro-second reconfiguration time. These unique dynamic metasurfaces may provide new opportunities for information optics and imaging by performing complex signal processing directly in the optical domain.
In this presentation, I will describe the fundamentals and advantages of incorporating metallic and dielectric metasurfaces onto MEMS devices and the challenges associated with their patterning and integration.
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