Photonic device sensitivity analysis methods: towards process variation-aware silicon photonics design

Sally I. El-Henawy; Zhengxing Zhang; Ryan Miller; Duane S. Boning

doi:10.1117/12.2529198

11 September 2019 Photonic device sensitivity analysis methods: towards process variation-aware silicon photonics design

Sally I. El-Henawy, Zhengxing Zhang, Ryan Miller, Duane S. Boning

Author Affiliations +

Proceedings Volume 11103, Optical Modeling and System Alignment; 111030P (2019) https://doi.org/10.1117/12.2529198
Event: SPIE Optical Engineering + Applications, 2019, San Diego, California, United States

Abstract

Silicon photonics offers the ability to fabricate and integrate photonic and electronic components using existing integrated circuit fabrication infrastructure. Recent work seeks to understand the impact of IC process variations on performance of photonic components. In particular, methods for analysis that identify sensitivity of photonic components to process variations are crucial to enable viable design and manufacturing of silicon photonic systems. We present two different and complementary methods for understanding the impact of geometric process variations on photonics components: ensemble statistical virtual fabrication simulations, and adjoint methods. These are utilized to identify the most sensitive regions of a Y-splitter photonic component to line edge roughness (LER) due to inherent lithography and etch process variations. In the ensemble approach, we simulate multiple instantiations with random LER applied to specific sections of the Y-splitter. This enables localization and quantification of LER impact on transmission, phase imbalance, and excess losses. These evaluations, however, come at the cost of many simulations. In adjoint sensitivity evaluation, only one or two simulations can identify regions most sensitive to LER. While first-order linear sensitivity is extracted, the adjoint has challenges in quantifying mean variation impacts. Both methods reveal that the Y-splitter is most sensitive to LER in the input taper, accounting for over 95% of the imbalance transmission. These two methods can be combined to quantify mean, variance, and sensitivity of photonic device components in the face of statistical variations. Incorporated into future photonic process design kits (PDKs), these analysis methods will help designers predict and optimize photonic component performance and yield.

Conference Presentation

Citation Download Citation

Sally I. El-Henawy, Zhengxing Zhang, Ryan Miller, and Duane S. Boning "Photonic device sensitivity analysis methods: towards process variation-aware silicon photonics design", Proc. SPIE 11103, Optical Modeling and System Alignment, 111030P (11 September 2019); https://doi.org/10.1117/12.2529198

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