CONFERENCE PROCEEDINGS
Advanced Search
Home > Proceedings > Volume 11148 > Article
Paper
26 September 2019 A case study of benefits for the "IOFF" MDP automation project: development, integration, and optimization of the Integrated-Optimized-Fracture-Flow (IOFF) into production
Adam Smith, Hari Konnanur
Author Affiliations +
Proceedings Volume 11148, Photomask Technology 2019; 111481L (2019) https://doi.org/10.1117/12.2539039
Event: SPIE Photomask Technology + EUV Lithography, 2019, Monterey, California, United States
Abstract
Over the last few decades, the scope of MDP has evolved from a handful of simple tasks, to veritable “jack of all trades”, capable of an enormous array of functions, in several different operational scenarios. These functions range from machine-specific fractures, to Boolean operations, OPC, MPC, checking, and beyond, under various scenarios including specific hardware configurations (such as single CPU vs. cluster, memory size, type, and location), software configurations (including operating system, load balancing, and prioritization), and inputs and outputs (formats, sizes, and so forth). While this versatile capability of tools, such as Synopsys’ CATS software, is powerful, the expertise required to operate them efficiently keeping abreast of the changing requirements and capabilities, poses a significant challenge to the average user.
© (2019) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
Adam Smith and Hari Konnanur "A case study of benefits for the "IOFF" MDP automation project: development, integration, and optimization of the Integrated-Optimized-Fracture-Flow (IOFF) into production", Proc. SPIE 11148, Photomask Technology 2019, 111481L (26 September 2019); https://doi.org/10.1117/12.2539039
ACCESS THE FULL ARTICLE
ORGANIZATIONAL
Sign in with credentials provided by your organization.
INSTITUTIONAL
Select your institution to access the SPIE Digital Library.
SELECT YOUR INSTITUTION
PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
PERSONAL SIGN IN
No SPIE Account? Create one
PURCHASE THIS CONTENT
SUBSCRIBE TO DIGITAL LIBRARY
50 downloads per 1-year subscription
Members: $195
Non-members: $335 ADD TO CART
25 downloads per 1 - year subscription
Members: $145
Non-members: $250 ADD TO CART
PURCHASE SINGLE ARTICLE
Includes PDF, HTML & Video, when available
Members: $17.00
Non-members: $21.00 ADD TO CART
PROCEEDINGS
 5 PAGES
DOWNLOAD PAPER SAVE TO MY LIBRARY
GET CITATION
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Computed tomography
Electronic design automation
Chemical elements
Data processing
Operating systems
Optical proximity correction
Photomasks
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top