Micro-ring resonator optical sensor based on silicon and silicon nitride waveguide

Jinsheng Ni; Mingyu Li; Jianjun He; Chang Su

doi:10.1117/12.2533464

17 May 2019 Micro-ring resonator optical sensor based on silicon and silicon nitride waveguide

Jinsheng Ni, Mingyu Li, Jianjun He, Chang Su

Proceedings Volume 11170, 14th National Conference on Laser Technology and Optoelectronics (LTO 2019); 111701Q (2019) https://doi.org/10.1117/12.2533464
Event: Fourteenth National Conference on Laser Technology and Optoelectronics, 2019, Shanghai, China

Abstract

In this paper, we compare the sensing sensitivity, the stability and the temperature sensitivity of the micro-ring resonator optical sensor based on silicon waveguide and silicon nitride waveguide. For the silicon waveguide and silicon nitride waveguide single ring, the sensing sensitivities are 1113nm/RIU and 182.64nm/RIU, the resonance wavelength variations are ±12.5pm and ±7.5pm in an hour testing at the ambient temperature and the temperature sensitivities are 0.038nm/K and 0.018nm/K, respectively. . The sensing sensitivity can be improved to 6080.6nm/RIU by cascaded double silicon nitride waveguide rings to produce Vernier effect.

Citation Download Citation

Jinsheng Ni, Mingyu Li, Jianjun He, and Chang Su "Micro-ring resonator optical sensor based on silicon and silicon nitride waveguide", Proc. SPIE 11170, 14th National Conference on Laser Technology and Optoelectronics (LTO 2019), 111701Q (17 May 2019); https://doi.org/10.1117/12.2533464

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