EUV pellicle qualification on transmission and reflectance

T. Missalla; A. Biermanns-Föth; C. Pampfer; J. Arps; C. Phiesel; C. Piel; R. Lebert

doi:10.1117/12.2537611

27 June 2019 EUV pellicle qualification on transmission and reflectance

T. Missalla, A. Biermanns-Föth, C. Pampfer, J. Arps, C. Phiesel, C. Piel, R. Lebert

Proceedings Volume 11178, Photomask Japan 2019: XXVI Symposium on Photomask and Next-Generation Lithography Mask Technology; 111780O (2019) https://doi.org/10.1117/12.2537611
Event: Photomask Japan 2019, 2019, Yokohama, Japan

Abstract

RI Research Instrument’s EUV pellicle transmission qualification tool EUV-PTT uses "effective inband EUV measurement" which is spectrally filtering emission of the EUV-Lamp to 2% bandwidth at 13.5 nm for measuring "as seen by the scanner". Images of about 20x20 mm² are recorded in less than 5 seconds. A full pellicle characterization with < 60 images taken is accomplished in less than one hour. The first prototype of the EUV-PTT is in production quality control since nearly one year at our customer and achieving targeted quality in measurement and cleanliness and meets uptime specifications. Amongst additional aspects to be addressed in quality control is the reflection from the pellicle, which - in worst case - may impair the printing performance in the scanner. Hence, recently, we have performed concept studies on applying the PTT technique to carbon nano tube pellicles and on measuring the reflectance of low reflectance samples are reported. The latter is heavily demanding as reflectances in the range of 0.02 % were measured with sensitivities and reproducibilities in the range of 0.002 %.

Citation Download Citation

T. Missalla, A. Biermanns-Föth, C. Pampfer, J. Arps, C. Phiesel, C. Piel, and R. Lebert "EUV pellicle qualification on transmission and reflectance", Proc. SPIE 11178, Photomask Japan 2019: XXVI Symposium on Photomask and Next-Generation Lithography Mask Technology, 111780O (27 June 2019); https://doi.org/10.1117/12.2537611

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KEYWORDS

Extreme ultraviolet

Pellicles

Reflectivity

Reflection

Scanners

Mirrors

Charge-coupled devices

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