Simulation of transmission characteristics of Fabry-Perot filter on silicon substrate

Shaoyu Zhao; Jiang Chen; Weiping Wang; Dongliang Zhang; Xiaoyan Hu

doi:10.1117/12.2538805

18 November 2019 Simulation of transmission characteristics of Fabry-Perot filter on silicon substrate

Shaoyu Zhao, Jiang Chen, Weiping Wang, Dongliang Zhang, Xiaoyan Hu

Proceedings Volume 11196, Infrared, Millimeter-Wave, and Terahertz Technologies VI; 111961R (2019) https://doi.org/10.1117/12.2538805
Event: SPIE/COS Photonics Asia, 2019, Hangzhou, China

Abstract

Transmission characteristics of Fabry-Perot (F-P) filter based on silicon substrate with different transmissivity of high reflection (HR) coatings, incident angle, and interference orders are investigated. The results show that the transmissivity of HR coatings has great effect on full width at half maximum (FWHM) of transmission spectrum, the FWHM of F-P filter reduced from 209 nm to 3.4 nm with the reflectivity of HR coatings increased from 84.7% to 99.6%. The peak wavelength shifts from 1546.3 nm at 0° to 1542.6 nm at 5°, indicating that the FWHM of transmission spectrum broadens as the incident angle increases. The 1st, 2nd, 3rd, and 4th order interference are 3.4 nm, 2.3 nm, 1.8 nm, and 1.5 nm, respectively. Thus, in the applications tuning in a narrow wavelength range, F-P filter can be designed to operate in high-order mode to achieve a narrow transmission spectrum.

Citation Download Citation

Shaoyu Zhao, Jiang Chen, Weiping Wang, Dongliang Zhang, and Xiaoyan Hu "Simulation of transmission characteristics of Fabry-Perot filter on silicon substrate", Proc. SPIE 11196, Infrared, Millimeter-Wave, and Terahertz Technologies VI, 111961R (18 November 2019); https://doi.org/10.1117/12.2538805

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