The use of laser printers for obtaining photomasks for the photolithography process

Kazimierz Gut; Sebastian Student

doi:10.1117/12.2539416

13 September 2019 The use of laser printers for obtaining photomasks for the photolithography process

Kazimierz Gut, Sebastian Student

Proceedings Volume 11204, 14th Conference on Integrated Optics: Sensors, Sensing Structures, and Methods; 112040J (2019) https://doi.org/10.1117/12.2539416
Event: Fourteenth Integrated Optics-Sensors, Sensing Structures and Methods Conference, 2019, Szcyrk-Gliwice, Poland

Abstract

For several decades, microfluidics and related fields have been dynamically developing. For the implementation of structures with a size of several dozen micrometers instead of expensive chrome photomasks, in some cases patterns printed on a typical film by laser printers can be used. The work will compare chrome masks and masks made by laser printers. The structures obtained by the less expensive masks printed on the film will also be presented.

Citation Download Citation

Kazimierz Gut and Sebastian Student "The use of laser printers for obtaining photomasks for the photolithography process", Proc. SPIE 11204, 14th Conference on Integrated Optics: Sensors, Sensing Structures, and Methods, 112040J (13 September 2019); https://doi.org/10.1117/12.2539416

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KEYWORDS

Photomasks

Optical lithography

Microfluidics

Nonimpact printing

Lithography

Microscopes

Computer aided design

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