Investigation Of Dielectric Laser Mirrors Using Transmission Electron Microscopy

J. Staub; V. Scheuer; T. Tschudi

doi:10.1117/12.961356

8 January 1990 Investigation Of Dielectric Laser Mirrors Using Transmission Electron Microscopy

J. Staub, V. Scheuer, T. Tschudi

Proceedings Volume 1125, Thin Films in Optics; (1990) https://doi.org/10.1117/12.961356
Event: 1989 International Congress on Optical Science and Engineering, 1989, Paris, France

Abstract

Cross-sections of dielectrical laser mirrors are examined by Transmission Electron Microscopy (TEM). The TEM picture shows the whole layer structure which offers the possibility to observe the development of interface roughness from the substrate up to the top layer. The TEM pictures reveal the great difference between the interface roughness of evaporated and ion beam sputtered layers. Using computer image processing techniques the increasing roughness within the evaporated layer system has been measured. Furthermore the correlation lengths of the roughness has been determined in this way. The knowledge of these two parameters over the entire system enables the calculation of scatter losses for the system.

Citation Download Citation

J. Staub, V. Scheuer, and T. Tschudi "Investigation Of Dielectric Laser Mirrors Using Transmission Electron Microscopy", Proc. SPIE 1125, Thin Films in Optics, (8 January 1990); https://doi.org/10.1117/12.961356

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