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2 March 2020 An electric measuring equipment integrated with an automatic optical registration and a chamber-based gas supply system for wafer-based gas sensors
Ming-Fu Chen, Yi-Hao Lin, Chih-Wen Chen, Po-Jui Chen, Yu-Hsin Lin, Wen-Hao Cho, Jian-Lin Chen
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Proceedings Volume 11287, Photonic Instrumentation Engineering VII; 112871E (2020) https://doi.org/10.1117/12.2545503
Event: SPIE OPTO, 2020, San Francisco, California, United States
Abstract
An innovative system structure was proposed including a linear probes device, an automatic optical registration system, a chamber-based gas supply system, a chuck table integrated with a heating device to efficiently evaluate the quality of sensors chips. The chamber-based gas supply system provided required gas concentration at the probing region. A chuck table integrated with a heating device to provide required uniform temperature was integrated to motion stage platform. An AOR system was implemented for registration of wafer automatically and adjustment of a linear probes device. Developed equipment had several advantages:(1) Registration process of wafer could be completed automatically within 50 seconds; (2) Required gas concentration could be quickly achieved within 60 seconds at testing region to save a lot of time and gas consumption; (3) Measurement could be finished within 30 minutes for a 6”-wafer with chip size of 1x1 mm under the condition of 10 chips probed for each time. The measuring efficiency was at least up to 10 times greater than the one of testing one by one for packaged sensors.
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Ming-Fu Chen, Yi-Hao Lin, Chih-Wen Chen, Po-Jui Chen, Yu-Hsin Lin, Wen-Hao Cho, and Jian-Lin Chen "An electric measuring equipment integrated with an automatic optical registration and a chamber-based gas supply system for wafer-based gas sensors", Proc. SPIE 11287, Photonic Instrumentation Engineering VII, 112871E (2 March 2020); https://doi.org/10.1117/12.2545503
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KEYWORDS
Semiconducting wafers
Gas sensors
Image registration
Imaging devices
Optical imaging
Integrated optics
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