Rigorous vase data fitting for ultrathin films

Zhimin Zhu Sr.; Joyce Lowes; Shawn Ye; Zhiqiang Fan; Darin Collins; James Lamb; Tim Limmer

doi:10.1117/12.2551934

23 March 2020 Rigorous vase data fitting for ultrathin films

Zhimin Zhu Sr., Joyce Lowes, Shawn Ye, Zhiqiang Fan, Darin Collins, James Lamb, Tim Limmer

Proceedings Volume 11327, Optical Microlithography XXXIII; 113270J (2020) https://doi.org/10.1117/12.2551934
Event: SPIE Advanced Lithography, 2020, San Jose, California, United States

Abstract

Measuring properties of ultrathin optical films is based on optical interference. Ultrathin films are very challenging to test, because their thicknesses are far smaller than the measuring wavelength, so very little phase shift can be detected. In this work, test sensitivity and accuracy are improved by a rigorous algorithm in which all unknowns {n,k,t} in their full space are fit together without approximations and presumptions. As a result, a software for variable-angle spectroscopic ellipsometer (VASE) data fitting was developed. It gives very reliable ultrathin-film measurement down to 2.5 nanometers. The software not only improves the reliability, accuracy of {n,k,t} measurement, but it also extends VASE capabilities to characterize a film’s optical quality.

Conference Presentation

Citation Download Citation

Zhimin Zhu Sr., Joyce Lowes, Shawn Ye, Zhiqiang Fan, Darin Collins, James Lamb, and Tim Limmer "Rigorous vase data fitting for ultrathin films", Proc. SPIE 11327, Optical Microlithography XXXIII, 113270J (23 March 2020); https://doi.org/10.1117/12.2551934

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available