Precision measurement of angle using digital speckle pattern interferometry

Fan Wu; Sijin Wu; Weixian Li; Xin Li

doi:10.1117/12.2548726

13 November 2019 Precision measurement of angle using digital speckle pattern interferometry

Fan Wu, Sijin Wu, Weixian Li, Xin Li

Proceedings Volume 11343, Ninth International Symposium on Precision Mechanical Measurements; 113431H (2019) https://doi.org/10.1117/12.2548726
Event: International Symposium on Precision Mechanical Measurements 2019, 2019, Chongqing, China

Abstract

A non-contact and non-cooperative method of angle measurement based on digital speckle pattern interferometry (DSPI) was introduced in this paper. Studies have shown that when the illumination angle of the DSPI system was every small, the angle can be determined according to the interferometric phase distribution and the length of the measured object. Thereby a direct relationship between the angle and the phase distribution was established. In our experiments, the resolution of measurement system was 0.00025° ( 0.9”), proving that the proposed method is effective for measuring small angles. Theoretically, this method can achieve higher resolution if the measurement noise can be minimized.

Citation Download Citation

Fan Wu, Sijin Wu, Weixian Li, and Xin Li "Precision measurement of angle using digital speckle pattern interferometry", Proc. SPIE 11343, Ninth International Symposium on Precision Mechanical Measurements, 113431H (13 November 2019); https://doi.org/10.1117/12.2548726

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