Silicon photonic crystal membrane ultrasonic sensor

Michael Zylstra; Brett Poulsen; Jayshri Sabarinathan

doi:10.1117/12.2554176

13 April 2020 Silicon photonic crystal membrane ultrasonic sensor

Michael Zylstra, Brett Poulsen, Jayshri Sabarinathan

Proceedings Volume 11354, Optical Sensing and Detection VI; 113540Y (2020) https://doi.org/10.1117/12.2554176
Event: SPIE Photonics Europe, 2020, Online Only

Abstract

We present a suspended-element silicon photonic crystal membrane sensor with a diaphragm area of 12 μm by 15 μm suitable for free-space ultrasonic acoustic measurements. The sensor is based on the position-dependent directional coupling between neighbouring photonic crystal edges and exhibits compatibility with broadband optical sources, low insertion loss, and more freedom in the mechanical design. By tuning the wavelength such that both time-averaged outputs of the directional coupler were balanced, a differential detection scheme was implemented where common noise sources were suppressed while enhancing the sensor signal without additional photonic components. Using a coiled speaker, the dynamic acoustic response of the sensor from 10 kHz to 80 kHz was measured and we report a peak system response in the difference signal at 40 kHz with a sensitivity of 40 μV/Pa. The compact size and improved mechanical frequency response of these integrated photonic sensors make them suitable for array applications, particularly for the study of fluid dynamics involving high Reynolds number phenomena.

Conference Presentation

Citation Download Citation

Michael Zylstra, Brett Poulsen, and Jayshri Sabarinathan "Silicon photonic crystal membrane ultrasonic sensor", Proc. SPIE 11354, Optical Sensing and Detection VI, 113540Y (13 April 2020); https://doi.org/10.1117/12.2554176

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