Influence of nonlinear error on measuring accuracy for a dual-frequency heterodyne interferometer using a polarization maintaining fiber

Xinyu Ma; Qibo Feng; Bin Zhang; Fajia Zheng

doi:10.1117/12.2544159

12 March 2020 Influence of nonlinear error on measuring accuracy for a dual-frequency heterodyne interferometer using a polarization maintaining fiber

Xinyu Ma, Qibo Feng, Bin Zhang, Fajia Zheng

Author Affiliations +

Proceedings Volume 11439, 2019 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems; 1143912 (2020) https://doi.org/10.1117/12.2544159
Event: 2019 International Conference on Optical Instruments and Technology, 2019, Beijing, China

Abstract

Dual-frequency heterodyne interferometer has been widely applied in many fields. It is also an important part for measuring position error in the system that laser simultaneously measure six degree of freedom geometric motion errors of a linear guide. To segregate the heat source, simplify the optical path and obtain a convenient delivery, a polarization maintain fiber (PMF) is used in the system for linking the laser source and the measurement section. However, the nonlinear error caused by PMF will reduce the measurement accuracy, and cannot be ignored in ultra-precision measurement. In this paper, a measurement model for analyzing the nonlinear error caused by the axis misalignment between the laser source and PMF was established with the Jones Matrix. Experiments were performed for verifying and calculating. The results show that the measuring error caused by nonlinear error is less than 2 nm with the axis misalignment being up to 10 degrees.

Citation Download Citation

Xinyu Ma, Qibo Feng, Bin Zhang, and Fajia Zheng "Influence of nonlinear error on measuring accuracy for a dual-frequency heterodyne interferometer using a polarization maintaining fiber", Proc. SPIE 11439, 2019 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems, 1143912 (12 March 2020); https://doi.org/10.1117/12.2544159

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KEYWORDS

Heterodyning

Interferometers

Polarization maintaining fibers

Laser sources

Error analysis

Laser systems engineering

Motion measurement

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